Dr. Deborah J. Kirby
Senior Research Scientist
SPIE Involvement:
Author
Publications (3)

Proceedings Article | 8 May 2012 Paper
Proc. SPIE. 8373, Micro- and Nanotechnology Sensors, Systems, and Applications IV
KEYWORDS: Microelectromechanical systems, Oscillators, Resonators, Quartz, Complex systems, Phase shift keying, Nonlinear dynamics, Phase measurement, Resistors, Temperature metrology

Proceedings Article | 15 August 2000 Paper
Proc. SPIE. 4176, Micromachined Devices and Components VI
KEYWORDS: Packaging, Gold, Electronics, Sensors, Electrodes, Nickel, Silicon, Control systems, High dynamic range imaging, Semiconducting wafers

Proceedings Article | 25 April 1997 Paper
Proc. SPIE. 3007, Silicon-Based Monolithic and Hybrid Optoelectronic Devices
KEYWORDS: Gold, Electronics, Magnesium, Sensors, Electrodes, Nickel, Control systems, Servomechanisms, Semiconducting wafers, Surface micromachining

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