Deepak Bansal
Scientist at CSIR-CEERI
SPIE Involvement:
Author
Area of Expertise:
MEMS , RF MEMS , Packaging
Websites:
Publications (6)

SPIE Journal Paper | 14 December 2018
Khushbu Mehta, Deepak Bansal, Anuroop Bajpai, Ashudeep Minhas, Amit Kumar, Maninder Kaur, Prem Kumar, Kamaljit Rangra
JM3, Vol. 17, Issue 04, 045001, (December 2018) https://doi.org/10.1117/12.10.1117/1.JMM.17.4.045001
KEYWORDS: Switches, Dielectrics, Microelectromechanical systems, Electrodes, Bridges, Switching, Temperature metrology, Metals, Capacitance, Reliability

SPIE Journal Paper | 6 October 2016
Prem Kumar, Deepak Bansal, Anuroop Bajpai, Maninder Kaur, Kamaljit Rangra
JM3, Vol. 15, Issue 04, 045001, (October 2016) https://doi.org/10.1117/12.10.1117/1.JMM.15.4.045001
KEYWORDS: Switches, Single point diamond turning, Microelectromechanical systems, Gold, Finite element methods, Photoresist materials, Metals, Capacitance, Etching

SPIE Journal Paper | 3 September 2015
Deepak Bansal, Anuroop Bajpai, Prem Kumar, Amit Kumar, Maninder Kaur, Kamaljit Rangra
JM3, Vol. 14, Issue 03, 035002, (September 2015) https://doi.org/10.1117/12.10.1117/1.JMM.14.3.035002
KEYWORDS: Switches, Microelectromechanical systems, Metals, Electrodes, Dielectrics, Capacitance, Switching, Oxides, Scanning electron microscopy

Proceedings Article | 7 March 2014 Paper
Akshdeep Sharma, Deepak Bansal, Amit Kumar, Dinesh Kumar, Kamaljit Rangra
Proceedings Volume 8973, 89730F (2014) https://doi.org/10.1117/12.2041433
KEYWORDS: Gold, Microelectromechanical systems, Plasma, Oxygen, Photoresist materials, Thin films, Electroplating, Plating, Power supplies, Wet etching

SPIE Journal Paper | 5 February 2014
Akshdeep Sharma, Prachi Jhanwar, Deepak Bansal, Amit Kumar, Maninder Kaur, Shilpi Pandey, Prem Kumar, Dinesh Kumar, Kamaljit Rangra
JM3, Vol. 13, Issue 01, 013005, (February 2014) https://doi.org/10.1117/12.10.1117/1.JMM.13.1.013005
KEYWORDS: Plasma, Microelectromechanical systems, Gold, Switches, Surface micromachining, Etching, Semiconducting wafers, Oxygen, Photomicroscopy

Showing 5 of 6 publications
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