Mr. Deepak Bansal
Scientist at CSIR-CEERI
SPIE Involvement:
Author
Area of Expertise:
MEMS , RF MEMS , Packaging
Websites:
Publications (5)

SPIE Journal Paper | October 6, 2016
JM3 Vol. 15 Issue 04
KEYWORDS: Switches, Single point diamond turning, Microelectromechanical systems, Gold, Finite element methods, Photoresist materials, Metals, Capacitance, Etching

SPIE Journal Paper | September 3, 2015
JM3 Vol. 14 Issue 03
KEYWORDS: Switches, Microelectromechanical systems, Metals, Electrodes, Dielectrics, Capacitance, Switching, Oxides, Scanning electron microscopy

PROCEEDINGS ARTICLE | March 7, 2014
Proc. SPIE. 8973, Micromachining and Microfabrication Process Technology XIX
KEYWORDS: Microelectromechanical systems, Gold, Thin films, Power supplies, Oxygen, Photoresist materials, Wet etching, Plating, Electroplating, Plasma

SPIE Journal Paper | February 5, 2014
JM3 Vol. 13 Issue 01
KEYWORDS: Plasma, Microelectromechanical systems, Gold, Switches, Surface micromachining, Etching, Semiconducting wafers, Oxygen, Photomicroscopy

PROCEEDINGS ARTICLE | October 15, 2012
Proc. SPIE. 8549, 16th International Workshop on Physics of Semiconductor Devices
KEYWORDS: Microelectromechanical systems, Packaging, Switches, Signal attenuation, Metals, Dielectrics, Silicon, Scanning electron microscopy, Neodymium, Semiconducting wafers

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