Deepak Bansal
Scientist at CSIR-CEERI
SPIE Involvement:
Author
Area of Expertise:
MEMS , RF MEMS , Packaging
Websites:
Publications (6)

SPIE Journal Paper | 14 December 2018
JM3 Vol. 17 Issue 04
KEYWORDS: Switches, Dielectrics, Microelectromechanical systems, Electrodes, Bridges, Switching, Temperature metrology, Metals, Capacitance, Reliability

SPIE Journal Paper | 6 October 2016
JM3 Vol. 15 Issue 04
KEYWORDS: Switches, Single point diamond turning, Microelectromechanical systems, Gold, Finite element methods, Photoresist materials, Metals, Capacitance, Etching

SPIE Journal Paper | 3 September 2015
JM3 Vol. 14 Issue 03
KEYWORDS: Switches, Microelectromechanical systems, Metals, Electrodes, Dielectrics, Capacitance, Switching, Oxides, Scanning electron microscopy

Proceedings Article | 7 March 2014
Proc. SPIE. 8973, Micromachining and Microfabrication Process Technology XIX
KEYWORDS: Microelectromechanical systems, Gold, Thin films, Power supplies, Oxygen, Photoresist materials, Wet etching, Plating, Electroplating, Plasma

SPIE Journal Paper | 5 February 2014
JM3 Vol. 13 Issue 01
KEYWORDS: Plasma, Microelectromechanical systems, Gold, Switches, Surface micromachining, Etching, Semiconducting wafers, Oxygen, Photomicroscopy

Showing 5 of 6 publications
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