Dr. Deepkishore Mukhopadhyay
Advanced Research Engineer at Bruker AFM Probes
SPIE Involvement:
Author
Publications (4)

Proceedings Article | 15 October 2012
Proc. SPIE. 8502, Advances in X-Ray/EUV Optics and Components VII
KEYWORDS: Microelectromechanical systems, Mirrors, Modulation, Sensors, X-rays, Reflectivity, Control systems, Micromirrors, Measurement devices, Synchrotrons

Proceedings Article | 16 February 2012
Proc. SPIE. 8252, MOEMS and Miniaturized Systems XI
KEYWORDS: Microelectromechanical systems, Mirrors, Oscillators, X-rays, Amplifiers, Linear filtering, Capacitance, Micromirrors, Signal detection, Atmospheric optics

Proceedings Article | 26 February 2008
Proc. SPIE. 6882, Micromachining and Microfabrication Process Technology XIII
KEYWORDS: Fabrication, Actuators, Optical lithography, Sensors, Etching, Silicon, Kinematics, Finite element methods, Aluminum, Plasma

Proceedings Article | 1 July 2005
Proc. SPIE. 5836, Smart Sensors, Actuators, and MEMS II
KEYWORDS: Actuators, Silica, Sensors, Metals, Crystals, Silicon, Kinematics, Photomasks, Microfabrication, Semiconducting wafers

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