Dr. Deh-Ming Shyu
at Industrial Technology Research Institute
SPIE Involvement:
Author
Publications (13)

Proceedings Article | 13 May 2013
Proc. SPIE. 8788, Optical Measurement Systems for Industrial Inspection VIII
KEYWORDS: Microscopes, Prisms, Microscopy, Error analysis, Silicon, Infrared radiation, Digital image correlation, Semiconducting wafers, Wafer bonding, Overlay metrology

Proceedings Article | 6 April 2012
Proc. SPIE. 8324, Metrology, Inspection, and Process Control for Microlithography XXVI
KEYWORDS: Microscopes, Optical microscopes, Metrology, Etching, Image processing, Silicon, Scanning electron microscopy, Objectives, Algorithm development, Semiconducting wafers

Proceedings Article | 3 April 2012
Proc. SPIE. 8324, Metrology, Inspection, and Process Control for Microlithography XXVI
KEYWORDS: Confocal microscopy, Infrared imaging, Metrology, Metals, Copper, Silicon, Reflectivity, Reflectometry, 3D metrology, Semiconducting wafers

Proceedings Article | 27 May 2011
Proc. SPIE. 8082, Optical Measurement Systems for Industrial Inspection VII
KEYWORDS: Confocal microscopy, Microscopes, Metrology, Metals, Annealing, Copper, Silicon, Reflectivity, 3D metrology, Semiconducting wafers

SPIE Journal Paper | 1 December 2009
OE Vol. 48 Issue 12
KEYWORDS: Overlay metrology, Diffraction, Scatterometry, Scatter measurement, Critical dimension metrology, Optical engineering, Detection and tracking algorithms, Diffraction gratings, Photoresist materials, Semiconductors

Showing 5 of 13 publications
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