Dr. Deirdre L. Olynick
at Univ. of California
SPIE Involvement:
Publications (17)

Proceedings Article | 12 May 2020 Paper
Proc. SPIE. 9919, Nanophotonic Materials XIII
KEYWORDS: Plasmonics, Gases, Atomic layer deposition, Nanophotonics, Plasma, Tin

Proceedings Article | 16 October 2017 Presentation
Proc. SPIE. 10450, International Conference on Extreme Ultraviolet Lithography 2017
KEYWORDS: Photons, Molecules, Electrons, Photoresist materials, Extreme ultraviolet, Extreme ultraviolet lithography

Proceedings Article | 3 October 2016 Presentation + Paper
Proc. SPIE. 9919, Nanophotonic Materials XIII
KEYWORDS: Oxides, Plasmonics, Data modeling, Metals, Spectroscopy, Spectroscopic ellipsometry, Atomic layer deposition, Plasma etching, Plasma

Proceedings Article | 20 March 2015 Paper
Proc. SPIE. 9425, Advances in Patterning Materials and Processes XXXII
KEYWORDS: Lithography, Electron beam lithography, Electron beams, Calibration, Chemistry, Atomic force microscopy, Scanning electron microscopy, Scanning probe microscopy, Line edge roughness, Line scan image sensors

SPIE Journal Paper | 5 September 2014
JM3 Vol. 13 Issue 03
KEYWORDS: Nanoimprint lithography, Metals, Multilayers, Etching, Polymethylmethacrylate, Optical lithography, Plasma, Ultraviolet radiation, Silicon films, Scanning electron microscopy

Showing 5 of 17 publications
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