Dr. Deirdre L. Olynick
at Univ. of California
SPIE Involvement:
Publications (16)

Proceedings Article | 16 October 2017
Proc. SPIE. 10450, International Conference on Extreme Ultraviolet Lithography 2017
KEYWORDS: Electrons, Molecules, Extreme ultraviolet, Photons, Extreme ultraviolet lithography, Photoresist materials

Proceedings Article | 3 October 2016
Proc. SPIE. 9919, Nanophotonic Materials XIII
KEYWORDS: Plasmonics, Metals, Atomic layer deposition, Tin, Plasma, Spectroscopic ellipsometry, Data modeling, Oxides, Plasma etching, Spectroscopy

Proceedings Article | 20 March 2015
Proc. SPIE. 9425, Advances in Patterning Materials and Processes XXXII
KEYWORDS: Electron beam lithography, Scanning electron microscopy, Scanning probe microscopy, Chemistry, Calibration, Line scan image sensors, Electron beams, Atomic force microscopy, Lithography, Line edge roughness

SPIE Journal Paper | 5 September 2014
JM3 Vol. 13 Issue 03
KEYWORDS: Nanoimprint lithography, Metals, Multilayers, Etching, Polymethylmethacrylate, Optical lithography, Plasma, Ultraviolet radiation, Silicon films, Scanning electron microscopy

Proceedings Article | 18 April 2013
Proc. SPIE. 8681, Metrology, Inspection, and Process Control for Microlithography XXVII
KEYWORDS: Atomic force microscopy, Neodymium, Chemistry, Scanning probe microscopy, Ions, Silicon, Scanning electron microscopy, Calibration, Extreme ultraviolet lithography, Transmission electron microscopy

Showing 5 of 16 publications
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