Dengpeng Yuan
Research Fellow at China Academy of Engineering Physics
SPIE Involvement:
Author
Publications (2)

SPIE Journal Paper | 19 August 2019
OE Vol. 58 Issue 08
KEYWORDS: Ion beams, Zone plates, Gold, Ions, Nanostructures, Electron beam lithography, Extreme ultraviolet, Sputter deposition, Optical engineering, Scanning electron microscopy

Proceedings Article | 12 August 2015
Proc. SPIE. 9624, 2015 International Conference on Optical Instruments and Technology: Micro/Nano Photonics and Fabrication
KEYWORDS: Waveguides, Polarization, Refractive index, Wave propagation, Silicon, Error analysis, Planar waveguides, Beam propagation method, Device simulation, Optoelectronics

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