Denis Jung
at Fraunhofer-Institut für Photonische Mikrosysteme
SPIE Involvement:
Author
Publications (2)

PROCEEDINGS ARTICLE | February 16, 2012
Proc. SPIE. 8252, MOEMS and Miniaturized Systems XI
KEYWORDS: Mirrors, Beam steering, Electrodes, Scanners, Laser applications, Micromirrors, Semiconducting wafers, Wafer bonding, Scalable video coding, Instrument modeling

PROCEEDINGS ARTICLE | February 24, 2009
Proc. SPIE. 7208, MOEMS and Miniaturized Systems VIII
KEYWORDS: Oxides, Mirrors, Etching, Electrodes, Silicon, Solids, Aluminum, Semiconducting wafers, Adhesives, Scalable video coding

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