Mr. Denis Yu. Kurbat Profile

Denis Yu. Kurbat

at Institute of Physics and Technology

SPIE Involvement:

Author

Publications (1)

Proceedings Article | 15 March 2019 Paper

M. Rudenko, A. Miakonkikh, D. Kurbat, V. Lukichev

Proceedings Volume 11022, 110221Y (2019) https://doi.org/10.1117/12.2522414

KEYWORDS: Etching, Silicon, Monte Carlo methods, Oxygen, Fluorine, Sputter deposition, Cryogenics, Plasma, Ions

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Keywords/Phrases