Mr. Dennis B. Ames Profile

Dennis B. Ames

Advisory Engineer at GlobalFoundries

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Publications (3)

Proceedings Article | 2 July 2003 Paper

Understanding the operating expense relationships of layouts on excimer photo tools

Dennis Ames

Proceedings Volume 5043, (2003) https://doi.org/10.1117/12.485273

KEYWORDS: Semiconducting wafers, Lamps, Excimers, Excimer lasers, Pulsed laser operation, Lithography, Laser optics, Microelectronics, Lithographic illumination, Mercury

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SPIE Journal Paper | 1 April 2003

Understanding chromatic aberration impacts on lithographic imaging

Kafai Lai, Ivan Lalovic, Robert Fair, Armen Kroyan, Christopher Progler, Nigel Farrar, Dennis Ames, Khurshid Ahmed

JM3, Vol. 2, Issue 02, (April 2003) https://doi.org/10.1117/12.10.1117/1.1562929

KEYWORDS: Chromatic aberrations, Image enhancement, Lithography, Excimer lasers, Image processing, Electroluminescence, Optical simulations, Lithographic illumination, Monochromatic aberrations, Deep ultraviolet

Proceedings Article | 5 July 2000 Paper

Determining and reducing the overhead losses in an ASIC-type environment

Dennis Ames

Proceedings Volume 4000, (2000) https://doi.org/10.1117/12.389085

KEYWORDS: Semiconducting wafers, Lithography, Reticles, Optical alignment, Lithographic illumination, Microelectronics, Manufacturing, Finite element methods, Optical lithography, Calibration

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