Dennis B. Ames
Advisory Engineer at GLOBALFOUNDRIES Inc
SPIE Involvement:
Author
Publications (3)

Proceedings Article | 2 July 2003
Proc. SPIE. 5043, Cost and Performance in Integrated Circuit Creation
KEYWORDS: Lithography, Lithographic illumination, Mercury, Lamps, Microelectronics, Excimer lasers, Excimers, Semiconducting wafers, Laser optics, Pulsed laser operation

SPIE Journal Paper | 1 April 2003
JM3 Vol. 2 Issue 02
KEYWORDS: Chromatic aberrations, Image enhancement, Lithography, Excimer lasers, Image processing, Electroluminescence, Optical simulations, Lithographic illumination, Monochromatic aberrations, Deep ultraviolet

Proceedings Article | 5 July 2000
Proc. SPIE. 4000, Optical Microlithography XIII
KEYWORDS: Lithography, Reticles, Optical lithography, Lithographic illumination, Calibration, Manufacturing, Finite element methods, Microelectronics, Optical alignment, Semiconducting wafers

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