Dr. Derek Bassett
at Tokyo Electron America Inc
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 19 March 2012
Proc. SPIE. 8325, Advances in Resist Materials and Processing Technology XXIX
KEYWORDS: Polymers, Capillaries, Finite element methods, Extreme ultraviolet, Line width roughness, Extreme ultraviolet lithography, Neodymium, Semiconducting wafers, Polymer thin films, Protactinium

Proceedings Article | 21 March 2006
Proc. SPIE. 6154, Optical Microlithography XIX
KEYWORDS: Microfluidics, Reflection, Polymers, Glasses, Scanners, Dewetting, Photoresist materials, Photomasks, Immersion lithography, Semiconducting wafers

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