Derek J. Summers
at Freescale Semiconductor Inc
SPIE Involvement:
Author
Publications (3)

Proceedings Article | 11 May 2009
Proc. SPIE. 7379, Photomask and Next-Generation Lithography Mask Technology XVI
KEYWORDS: Reticles, Inspection, Semiconducting wafers, Data analysis, Defect inspection, Photomasks, Air contamination, Databases, Manufacturing, Error analysis

Proceedings Article | 24 March 2009
Proc. SPIE. 7272, Metrology, Inspection, and Process Control for Microlithography XXIII
KEYWORDS: Reticles, Inspection, Semiconducting wafers, Data analysis, Defect inspection, Photomasks, Air contamination, Databases, Manufacturing, Error analysis

Proceedings Article | 17 October 2008
Proc. SPIE. 7122, Photomask Technology 2008
KEYWORDS: Reticles, Inspection, Semiconducting wafers, Data analysis, Defect inspection, Photomasks, Air contamination, Databases, Manufacturing, Error analysis

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