Dr. Detlef Billep Profile

Dr. Detlef Billep

at Technische Univ Chemnitz

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Author

Publications (5)

Proceedings Article | 9 February 2009 Paper

Analysis of image quality for laser display scanner test

H. Specht, S. Kurth, D. Billep, T. Gessner

Proceedings Volume 7206, 72060G (2009) https://doi.org/10.1117/12.808674

KEYWORDS: Image quality, Mirrors, Laser based displays, Distortion, Micromirrors, Laser scanners, Image processing, Cameras, 3D scanning, Projection systems

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Proceedings Article | 1 July 2005 Paper

Post-processing gap reduction in a micromachined resonator for vacuum pressure measurement

Detlef Billep, Karla Hiller, Jorg Fromel, Dirk Tenholte, Danny Reuter, Wolfram Dotzel, Thomas Gessner

Proceedings Volume 5836, (2005) https://doi.org/10.1117/12.608312

KEYWORDS: Silicon, Semiconducting wafers, Resonators, Wafer bonding, Sensors, Etching, Electrodes, Deep reactive ion etching, Oxides, Aluminum

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Proceedings Article | 22 January 2005 Paper

Bonding and deep RIE: a powerful combination for high-aspect-ratio sensors and actuators

Karla Hiller, Matthias Kuechler, Detlef Billep, Bernd Schroeter, Marco Dienel, Dirk Scheibner, Thomas Gessner

Proceedings Volume 5715, (2005) https://doi.org/10.1117/12.591509

KEYWORDS: Semiconducting wafers, Silicon, Etching, Wafer bonding, Electrodes, Oxides, Aluminum, Glasses, Sensors, Reactive ion etching

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Proceedings Article | 7 April 2004 Paper

Application of micromirror arrays for Hadamard transform optics

Marian Hanf, Steffen Kurth, Detlef Billep, Ramon Hahn, Wolfgang Faust, Steffen Heinz, Wolfram Doetzel, Thomas Gessner

Proceedings Volume 5445, (2004) https://doi.org/10.1117/12.558419

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Proceedings Article | 11 April 1997 Paper

Silicon mirror arrays fabricated by using bulk and surface micromachining

Thomas Gessner, Wolfram Doetzel, Detlef Billep, Ramon Hahn, Christian Kaufmann, Kersten Kehr, Steffen Kurth, Carmen Steiniger, Udo Wollmann

Proceedings Volume 3008, (1997) https://doi.org/10.1117/12.271427

KEYWORDS: Mirrors, Silicon, Semiconducting wafers, Electrodes, Actuators, Etching, Glasses, Wafer bonding, Metals, Micromirrors

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