Dr. Detlef Billep
at Technische Univ Chemnitz
SPIE Involvement:
Author
Publications (5)

PROCEEDINGS ARTICLE | February 9, 2009
Proc. SPIE. 7206, Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS and Nanodevices VIII
KEYWORDS: Mirrors, Cameras, Image processing, Distortion, Laser scanners, Image quality, Projection systems, Micromirrors, 3D scanning, Laser based displays

PROCEEDINGS ARTICLE | July 1, 2005
Proc. SPIE. 5836, Smart Sensors, Actuators, and MEMS II
KEYWORDS: Oxides, Resonators, Sensors, Etching, Electrodes, Silicon, Aluminum, Deep reactive ion etching, Semiconducting wafers, Wafer bonding

PROCEEDINGS ARTICLE | January 22, 2005
Proc. SPIE. 5715, Micromachining and Microfabrication Process Technology X
KEYWORDS: Oxides, Sensors, Etching, Electrodes, Glasses, Silicon, Aluminum, Reactive ion etching, Semiconducting wafers, Wafer bonding

PROCEEDINGS ARTICLE | April 7, 2004
Proc. SPIE. 5445, Microwave and Optical Technology 2003

PROCEEDINGS ARTICLE | April 11, 1997
Proc. SPIE. 3008, Miniaturized Systems with Micro-Optics and Micromechanics II
KEYWORDS: Actuators, Mirrors, Etching, Electrodes, Metals, Glasses, Silicon, Micromirrors, Semiconducting wafers, Wafer bonding

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