Dr. Detlef Billep
at Technische Univ Chemnitz
SPIE Involvement:
Author
Publications (5)

Proceedings Article | 9 February 2009 Paper
Proc. SPIE. 7206, Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS and Nanodevices VIII
KEYWORDS: Mirrors, Cameras, Image processing, Distortion, Laser scanners, Image quality, Projection systems, Micromirrors, 3D scanning, Laser based displays

Proceedings Article | 1 July 2005 Paper
Proc. SPIE. 5836, Smart Sensors, Actuators, and MEMS II
KEYWORDS: Oxides, Resonators, Sensors, Etching, Electrodes, Silicon, Aluminum, Deep reactive ion etching, Semiconducting wafers, Wafer bonding

Proceedings Article | 22 January 2005 Paper
Proc. SPIE. 5715, Micromachining and Microfabrication Process Technology X
KEYWORDS: Oxides, Sensors, Etching, Electrodes, Glasses, Silicon, Aluminum, Reactive ion etching, Semiconducting wafers, Wafer bonding

Proceedings Article | 7 April 2004 Paper
Proc. SPIE. 5445, Microwave and Optical Technology 2003

Proceedings Article | 11 April 1997 Paper
Proc. SPIE. 3008, Miniaturized Systems with Micro-Optics and Micromechanics II
KEYWORDS: Actuators, Mirrors, Etching, Electrodes, Metals, Glasses, Silicon, Micromirrors, Semiconducting wafers, Wafer bonding

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