Dr. Detlef Billep
at Technische Univ Chemnitz
SPIE Involvement:
Author
Publications (5)

Proceedings Article | 9 February 2009
Proc. SPIE. 7206, Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS and Nanodevices VIII
KEYWORDS: Image quality, Mirrors, Laser based displays, Distortion, Micromirrors, Laser scanners, Image processing, Cameras, 3D scanning, Projection systems

Proceedings Article | 1 July 2005
Proc. SPIE. 5836, Smart Sensors, Actuators, and MEMS II
KEYWORDS: Silicon, Semiconducting wafers, Resonators, Wafer bonding, Sensors, Etching, Electrodes, Deep reactive ion etching, Oxides, Aluminum

Proceedings Article | 22 January 2005
Proc. SPIE. 5715, Micromachining and Microfabrication Process Technology X
KEYWORDS: Semiconducting wafers, Silicon, Etching, Wafer bonding, Electrodes, Oxides, Aluminum, Glasses, Sensors, Reactive ion etching

Proceedings Article | 7 April 2004
Proc. SPIE. 5445, Microwave and Optical Technology 2003

Proceedings Article | 11 April 1997
Proc. SPIE. 3008, Miniaturized Systems with Micro-Optics and Micromechanics II
KEYWORDS: Mirrors, Silicon, Semiconducting wafers, Electrodes, Actuators, Etching, Glasses, Wafer bonding, Metals, Micromirrors

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