Mr. Devin Ramdutt
at Australian National Univ
SPIE Involvement:
Author
Publications (1)

PROCEEDINGS ARTICLE | February 16, 2005
Proc. SPIE. 5651, Biomedical Applications of Micro- and Nanoengineering II
KEYWORDS: Proteins, Etching, Polymers, Ions, Silicon, Gases, Plasma etching, Fluorine, Semiconducting wafers, Plasma

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