Dr. Dexin Kong
Metrology Engineer at Meta
SPIE Involvement:
Publications (6)

Proceedings Article | 4 May 2020 Presentation + Paper
Proceedings Volume 11325, 113251I (2020) https://doi.org/10.1117/12.2551498
KEYWORDS: Scatterometry, Machine learning, Semiconducting wafers, Critical dimension metrology, Etching, Photoresist materials, Lithography, Metrology, Scatter measurement, Data modeling

Proceedings Article | 2 April 2020 Presentation + Paper
Proceedings Volume 11325, 1132514 (2020) https://doi.org/10.1117/12.2551931
KEYWORDS: Atomic force microscopy, Metrology, Transmission electron microscopy, Gallium arsenide, 3D metrology, Measurement devices, Scanning electron microscopy, Semiconducting wafers, Visualization, X-ray optics

Proceedings Article | 24 March 2020 Presentation
Iqbal Saraf, Shyam Sridhar, Christopher Catano, Sergey Voronin, Dexin Kong, Soon-Cheon Seo, Youngseok Kim, Takashi Ando, Nicole Saulnier, Vijay Narayanan
Proceedings Volume 11329, 113290N (2020) https://doi.org/10.1117/12.2552035

Proceedings Article | 2 July 2019 Presentation + Paper
Dexin Kong, Koichi Motoyama, Abraham Arceo de la peña, Huai Huang, Brock Mendoza, Mary Breton, Gangadhara Raja Muthinti, Hosadurga Shobha, Liying Jiang, Juntao Li, James Demarest, John Gaudiello, Gauri Karve, Aron Cepler, Matthew Sendelbach, Susan Emans, Paul Isbester, Kavita Shah, Shay Wolfing, Avron Ger
Proceedings Volume 10959, 109590A (2019) https://doi.org/10.1117/12.2515257
KEYWORDS: Metrology, Machine learning, Scatterometry, Copper

Proceedings Article | 5 September 2018 Presentation + Paper
Proceedings Volume 10585, 1058510 (2018) https://doi.org/10.1117/12.2297377
KEYWORDS: Scatterometry, Semiconducting wafers, Scanning electron microscopy, Machine learning, Metrology, Data modeling, Scatter measurement, Mathematical modeling, Transmission electron microscopy, Field effect transistors

Showing 5 of 6 publications
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