Prof. Deyong Chen
at Institute of Electrical Engineering
SPIE Involvement:
Author
Publications (9)

Proceedings Article | 3 February 2009
Proc. SPIE. 7159, 2008 International Conference on Optical Instruments and Technology: MEMS/NEMS Technology and Applications
KEYWORDS: Microelectromechanical systems, Packaging, Signal to noise ratio, Resonators, Sensors, Electrodes, Silicon, Sensor performance, Finite element methods, Boron

Proceedings Article | 3 February 2009
Proc. SPIE. 7159, 2008 International Conference on Optical Instruments and Technology: MEMS/NEMS Technology and Applications
KEYWORDS: Resonators, Sensors, Electrodes, Silicon, 3D modeling, Optical simulations, Boron, Wet etching, Environmental sensing, Device simulation

Proceedings Article | 3 February 2009
Proc. SPIE. 7159, 2008 International Conference on Optical Instruments and Technology: MEMS/NEMS Technology and Applications
KEYWORDS: Silica, Electrodes, Metals, Crystals, Silicon, Finite element methods, Gyroscopes, Semiconducting wafers, Electromagnetism, Temperature metrology

Proceedings Article | 14 November 2002
Proc. SPIE. 4935, Smart Structures, Devices, and Systems
KEYWORDS: Microelectromechanical systems, Thin films, Sensors, Crystals, Silicon, Computer simulations, Silicon films, Finite element methods, Semiconducting wafers, Temperature metrology

Proceedings Article | 15 October 2001
Proc. SPIE. 4601, Micromachining and Microfabrication Process Technology and Devices

Showing 5 of 9 publications
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