Dr. Dhairya Dixit
at GLOBALFOUNDRIES Inc
SPIE Involvement:
Author
Publications (8)

PROCEEDINGS ARTICLE | March 21, 2018
Proc. SPIE. 10585, Metrology, Inspection, and Process Control for Microlithography XXXII
KEYWORDS: Metrology, Modulation, Sensors, Etching, Silicon, Signal processing, Semiconducting wafers, Yield improvement, Temperature metrology, Plasma

PROCEEDINGS ARTICLE | March 28, 2017
Proc. SPIE. 10145, Metrology, Inspection, and Process Control for Microlithography XXXI
KEYWORDS: Ellipsometry, Mueller matrices, Metrology, Diffractive optical elements, 3D modeling, Transmission electron microscopy, Scatterometry, Optical metrology, Process control, Spectroscopic ellipsometry, Critical dimension metrology, Reactive ion etching, Chemical elements, Semiconducting wafers, Optics manufacturing, Overlay metrology

SPIE Journal Paper | March 14, 2016
JM3 Vol. 15 Issue 01
KEYWORDS: Directed self assembly, Critical dimension metrology, Scatterometry, Polymethylmethacrylate, Optical components, Picosecond phenomena, Optical simulations, Chemical elements, Optical lithography, Ellipsometry

SPIE Journal Paper | August 3, 2015
JM3 Vol. 14 Issue 03
KEYWORDS: Line edge roughness, Silicon, Scatterometry, Data modeling, Optical components, Scanning electron microscopy, Picosecond phenomena, Chemical elements, Line width roughness, Optical properties

SPIE Journal Paper | April 10, 2015
JM3 Vol. 14 Issue 02
KEYWORDS: Silicon, Picosecond phenomena, Scatterometry, Anisotropy, Semiconducting wafers, Data modeling, Metrology, Optical lithography, Chemical elements, Directed self assembly

PROCEEDINGS ARTICLE | April 10, 2015
Proc. SPIE. 9424, Metrology, Inspection, and Process Control for Microlithography XXIX
KEYWORDS: Optical components, Data modeling, Optical properties, Spatial frequencies, Silicon, Scatterometry, Critical dimension metrology, Line edge roughness, Chemical elements, Inverse optics

Showing 5 of 8 publications
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