Dianne J. Coleman
Member of Technical Staff at Aerospace Corp
SPIE Involvement:
Author
Publications (11)

SPIE Journal Paper | June 30, 2018
JATIS Vol. 4 Issue 03
KEYWORDS: Contamination, Gold, Semiconducting wafers, Vacuum ultraviolet, Mirrors, Silicon, Microscopes, Head-mounted displays, Temperature metrology, Thin films

SPIE Journal Paper | January 4, 2018
OE Vol. 57 Issue 01
KEYWORDS: Vacuum ultraviolet, Semiconducting wafers, Contamination, Silicon, Lamps, Liquids, Scattering, Epoxies, Optical engineering, Wafer-level optics

PROCEEDINGS ARTICLE | October 15, 2012
Proc. SPIE. 8492, Optical System Contamination: Effects, Measurements, and Control 2012
KEYWORDS: Oxides, Silicon, Lamps, Ultrasonics, Silicon films, Astronomical imaging, Analog electronics, Vacuum ultraviolet, Adhesives, Natural surfaces

PROCEEDINGS ARTICLE | September 8, 2010
Proc. SPIE. 7794, Optical System Contamination: Effects, Measurements, and Control 2010
KEYWORDS: Gold, Contamination, Aerospace engineering, Scattering, Molecules, Silicon, Silicon films, Silicon carbide, Vacuum ultraviolet, Semiconducting wafers

PROCEEDINGS ARTICLE | September 2, 2008
Proc. SPIE. 7069, Optical System Contamination: Effects, Measurements, and Control 2008
KEYWORDS: Microscopes, Contamination, Molecules, Silicon, Raman spectroscopy, Polymerization, Space operations, Vacuum ultraviolet, Photomicroscopy, Semiconducting wafers

PROCEEDINGS ARTICLE | September 7, 2006
Proc. SPIE. 6291, Optical Systems Degradation, Contamination, and Stray Light: Effects, Measurements, and Control II
KEYWORDS: Gold, Mirrors, Contamination, Silica, Scattering, Particles, Silicon, Platinum, Aluminum, Vacuum ultraviolet

Showing 5 of 11 publications
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