Dr. Dieter Flamm Profile

Dr. Dieter Flamm

at Institute for Surface Modifica

SPIE Involvement:

Author

Publications (4)

Proceedings Article | 22 December 2003 Paper

Axel Schindler, Dieter Flamm, Marion Berger

Proceedings Volume 5180, (2003) https://doi.org/10.1117/12.505658

KEYWORDS: Ions, Surface finishing, Calcium, Polishing, Ion beams, Sputter deposition, Gases, Vacuum ultraviolet, Crystals, Oxides

Proceedings Article | 9 November 2001 Paper

Bernd Rauschenbach, Renate Fechner, Wilfried Frank, Georg Boehm, Frank Frost, Dieter Flamm, Frieder Bigl, Thomas Haensel, Axel Schindler

Proceedings Volume 4440, (2001) https://doi.org/10.1117/12.448043

KEYWORDS: Ion beams, Etching, Ions, Surface finishing, Plasma, Plasma etching, Polishing, Silica, Ion beam finishing, Argon

Proceedings Article | 18 August 2000 Paper

Torsten Harzendorf, Axel Schindler, Ernst-Bernhard Kley, Dieter Flamm

Proceedings Volume 4179, (2000) https://doi.org/10.1117/12.395680

KEYWORDS: Ions, Etching, Photoresist materials, Calcium, Microlens, Surface roughness, Sputter deposition, Lenses, Ion beams, Microlens array

Proceedings Article | 6 September 1999 Paper

Axel Schindler, Andreas Nickel, Thomas Haensel, H.-J. Thomas, Dieter Flamm

Proceedings Volume 3739, (1999) https://doi.org/10.1117/12.360142

KEYWORDS: Ion beams, Etching, Ions, Silica, Aspheric lenses, Surface roughness, Reactive ion etching, Carbon, Camera shutters, Plasma

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