Dr. Dieter Nees
Senior Scientist at JOANNEUM RESEARCH Forschungsgesellschaft mbH
SPIE Involvement:
Author
Publications (4)

PROCEEDINGS ARTICLE | March 14, 2018
Proc. SPIE. 10520, Laser-based Micro- and Nanoprocessing XII
KEYWORDS: Lithography, Photovoltaics, Mirrors, Optical lithography, Lenses, Ultraviolet radiation, Solar cells, Micro optics, Nanoimprint lithography, Nano optics

PROCEEDINGS ARTICLE | March 22, 2016
Proc. SPIE. 9777, Alternative Lithographic Technologies VIII
KEYWORDS: Lithography, Optical lithography, Polymers, Nickel, Silicon, Coating, Manufacturing, Scanning electron microscopy, Nanoimprint lithography, Critical dimension metrology, Photomicroscopy

SPIE Journal Paper | October 21, 2014
JM3 Vol. 13 Issue 04
KEYWORDS: Nanoimprint lithography, Etching, Silicon, Dry etching, Polymers, Photoresist processing, Nickel, Inkjet technology, Nanostructures, Reactive ion etching

PROCEEDINGS ARTICLE | March 28, 2014
Proc. SPIE. 9049, Alternative Lithographic Technologies VI
KEYWORDS: Nanostructures, Refractive index, Etching, Dry etching, Silicon, Surface roughness, Nanoimprint lithography, Photoresist processing, Semiconducting wafers, Positron emission tomography

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