Dr. Dieter Michael Profunser
Research Assistant at ETH Zürich
SPIE Involvement:
Author
Publications (9)

PROCEEDINGS ARTICLE | December 24, 2011
Proc. SPIE. 8204, Smart Nano-Micro Materials and Devices
KEYWORDS: Gold, Scattering, Signal attenuation, Crystals, Silicon, Fourier transforms, Numerical simulations, Wave propagation, Picosecond phenomena, Acoustics

PROCEEDINGS ARTICLE | June 18, 2007
Proc. SPIE. 6616, Optical Measurement Systems for Industrial Inspection V
KEYWORDS: Microelectromechanical systems, Thin films, Polymethylmethacrylate, Silicon, Inspection, Nondestructive evaluation, Optical testing, Wave propagation, Picosecond phenomena, Acoustics

PROCEEDINGS ARTICLE | June 13, 2005
Proc. SPIE. 5856, Optical Measurement Systems for Industrial Inspection IV
KEYWORDS: Copper, Interfaces, Diffusion, Reflectivity, Scanning electron microscopy, Transmission electron microscopy, Photoacoustic spectroscopy, Tantalum, Acoustics, Absorption

PROCEEDINGS ARTICLE | July 21, 2004
Proc. SPIE. 5392, Testing, Reliability, and Application of Micro- and Nano-Material Systems II
KEYWORDS: Gold, Thin films, Interfaces, Diffusion, Reflectivity, Wave propagation, Profiling, Aluminum, Picosecond phenomena, Acoustics

PROCEEDINGS ARTICLE | October 3, 2003
Proc. SPIE. 5145, Microsystems Engineering: Metrology and Inspection III
KEYWORDS: Gold, Thin films, Interfaces, Diffusion, Reflectivity, Wave propagation, Aluminum, Picosecond phenomena, Acoustics, Pulsed laser operation

PROCEEDINGS ARTICLE | October 3, 2003
Proc. SPIE. 5145, Microsystems Engineering: Metrology and Inspection III
KEYWORDS: Microelectromechanical systems, Thin films, Reflection, Interfaces, Silicon, Reflectivity, Silicon films, Aluminum, Picosecond phenomena, Acoustics

Showing 5 of 9 publications
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