Dilip Patel
Defect Metrology Manager
SPIE Involvement:
Publications (5)

Proceedings Article | 20 April 2011 Paper
Priyanka Kohli, Jeff Lyons, Andrew D. L. Humphris, Benjamin D. Bunday, Abraham Arceo, Akira Hamaguchi, Dilip Patel, David Bakker
Proceedings Volume 7971, 797119 (2011) https://doi.org/10.1117/12.879456
KEYWORDS: Semiconducting wafers, Image processing, Copper, Microscopy, Scanning electron microscopy, Safety, Semiconductors, Chemical mechanical planarization, Etching, Neodymium

Proceedings Article | 2 April 2010 Paper
Richard Silver, Bryan Barnes, Yeungjoon Sohn, Richard Quintanilha, Hui Zhou, Chris Deeb, Mark Johnson, Milton Goodwin, Dilip Patel
Proceedings Volume 7638, 76380J (2010) https://doi.org/10.1117/12.850935
KEYWORDS: Polarization, Defect detection, Defect inspection, Finite-difference time-domain method, Neodymium, Metrology, Semiconducting wafers, Illumination engineering, 3D modeling, Wafer-level optics

Proceedings Article | 5 April 2007 Paper
Proceedings Volume 6518, 65181K (2007) https://doi.org/10.1117/12.714216
KEYWORDS: Metrology, Overlay metrology, Inspection, Semiconducting wafers, Process control, Yield improvement, Critical dimension metrology, Optical proximity correction, Etching, Lithography

Proceedings Article | 5 April 2007 Paper
Kyuhong Lim, Dilip Patel, Kyoungmo Yang, Shunsuke Koshihara, Lorena Page, Andy Self, Maurilio Martinez
Proceedings Volume 6518, 65184A (2007) https://doi.org/10.1117/12.711026
KEYWORDS: Inspection, Semiconducting wafers, Metrology, Scanning electron microscopy, Process control, Optical lithography, Integrated circuits, Integrated circuit design, Manufacturing, Defect detection

Proceedings Article | 24 March 2006 Paper
Proceedings Volume 6152, 615207 (2006) https://doi.org/10.1117/12.664190
KEYWORDS: Defect detection, Semiconducting wafers, Inspection, Scanning electron microscopy, Target recognition, Metrology, Manufacturing, Wafer inspection, Particles, Chemical analysis

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