Dimitrios M. Tsamados
at ENSERG
SPIE Involvement:
Author
Publications (1)

PROCEEDINGS ARTICLE | December 30, 2003
Proc. SPIE. 5342, Micromachining and Microfabrication Process Technology IX
KEYWORDS: Lithography, Sensors, Calibration, Etching, Silicon, Resistance, Finite element methods, Deep reactive ion etching, Semiconducting wafers, Protactinium

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