Dinesh Kumar Venkatachalam
at Royal Melbourne Institute of Technology
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 9 January 2008
Proc. SPIE. 6800, Device and Process Technologies for Microelectronics, MEMS, Photonics, and Nanotechnology IV
KEYWORDS: Lithium niobate, Titanium, Lithium, Etching, Crystals, Ions, Diffusion, Oxygen, Niobium, Semiconducting wafers

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