Dr. Dinesh Kumar
at Lawrence Berkeley National Lab.
SPIE Involvement:
Publications (6)

Proceedings Article | 22 November 2023 Poster
Proceedings Volume PC12750, PC1275012 (2023) https://doi.org/10.1117/12.2689943
KEYWORDS: Scattering, X-rays, X-ray imaging, Metrology, Systems modeling, X-ray sources, X-ray characterization, Time metrology, Spatial resolution, Simulations

Proceedings Article | 24 March 2020 Presentation
Dinesh Kumar, Isvar Cordova, Ron Pandolfi, Patrick Naulleau, Cheng Wang, Alex Hexemer, Guillaume Freychet
Proceedings Volume 11325, 113251A (2020) https://doi.org/10.1117/12.2552155

SPIE Journal Paper | 3 May 2019 Open Access
Guillaume Freychet, Isvar Cordova, Terry McAfee, Dinesh Kumar, Ronald Pandolfi, Chris Anderson, Scott Dhuey, Patrick Naulleau, Cheng Wang, Alexander Hexemer
JM3, Vol. 18, Issue 02, 024003, (May 2019) https://doi.org/10.1117/12.10.1117/1.JMM.18.2.024003
KEYWORDS: Scattering, X-rays, 3D image reconstruction, Extreme ultraviolet, X-ray imaging, Extreme ultraviolet lithography, 3D image processing, Modulation, Carbon, Image enhancement

Proceedings Article | 26 March 2019 Presentation
Guillaume Freychet, Dinesh Kumar, Ron Pandolfi, Isvar Cordova, Patrick Naulleau, Alexander Hexemer, Gian Lorusso
Proceedings Volume 10959, 109590R (2019) https://doi.org/10.1117/12.2514954
KEYWORDS: X-rays, Line edge roughness, Scattering, Data modeling, Data acquisition, Line width roughness, Manufacturing, Nanostructures, Scanning electron microscopy, Electron microscopes

Proceedings Article | 9 October 2018 Presentation + Paper
Ronald Pandolfi, Guillaume Freychet, Isvar Cordova, Terry McAfee, Chris Anderson, Cheng Wang, Patrick Naulleau, Alexander Hexemer, Dinesh Kumar
Proceedings Volume 10809, 108090V (2018) https://doi.org/10.1117/12.2502769
KEYWORDS: Scattering, X-rays, Extreme ultraviolet lithography, Modulation, Extreme ultraviolet, Carbon, X-ray imaging, Absorption, 3D image reconstruction, Laser scattering

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