Dr. Dmitriy V. Likhachev
Member of Technical Staff at GLOBALFOUNDRIES Dresden Module One
SPIE Involvement:
Author
Publications (5)

Proceedings Article | 22 March 2018
Proc. SPIE. 10585, Metrology, Inspection, and Process Control for Microlithography XXXII
KEYWORDS: Wafer-level optics, Metrology, Data modeling, Etching, Manufacturing, Data processing, Process control, Machine learning, Semiconducting wafers, Optics manufacturing

Proceedings Article | 26 June 2017
Proc. SPIE. 10330, Modeling Aspects in Optical Metrology VI
KEYWORDS: Mathematical modeling, Semiconductors, Modeling, Dielectrics, Manufacturing, 3D modeling, Optical metrology, Spectroscopic ellipsometry, Semiconductor manufacturing, Data analysis

Proceedings Article | 26 June 2017
Proc. SPIE. 10330, Modeling Aspects in Optical Metrology VI
KEYWORDS: Mathematical modeling, Modeling, Oscillators, Statistical analysis, Data modeling, Optical metrology, Spectroscopic ellipsometry, Data analysis

Proceedings Article | 28 March 2017
Proc. SPIE. 10145, Metrology, Inspection, and Process Control for Microlithography XXXI
KEYWORDS: Diffractive optical elements, Data modeling, Optical properties, Etching, Metals, Dielectrics, Photomasks, Semiconducting wafers, Optics manufacturing, Tin

Proceedings Article | 18 March 2016
Proc. SPIE. 9778, Metrology, Inspection, and Process Control for Microlithography XXX
KEYWORDS: Oxides, Metrology, Magnesium, Diffractive optical elements, Data modeling, Silica, Optical properties, Annealing, Crystals, Interfaces, Ions, Silicon, Scatterometry, Reflectometry, Ion implantation, Critical dimension metrology, Semiconducting wafers

SIGN IN TO:
  • View contact details

UPDATE YOUR PROFILE
Is this your profile? Update it now.
Don’t have a profile and want one?

Advertisement
Advertisement
Back to Top