Dr. Dmitriy L. Voronov
Staff scientist at Lawrence Berkeley National Lab
SPIE Involvement:
Author
Publications (23)

PROCEEDINGS ARTICLE | August 23, 2017
Proc. SPIE. 10386, Advances in X-Ray/EUV Optics and Components XII
KEYWORDS: Diffraction gratings, Nanoimprint lithography, Electron beam lithography, X-ray optics

PROCEEDINGS ARTICLE | September 15, 2016
Proc. SPIE. 9963, Advances in X-Ray/EUV Optics and Components XI
KEYWORDS: Diffraction gratings, Diffraction, X-rays, X-ray diffraction, Etching, Extreme ultraviolet lithography, Monochromators, Plasma etching, Wet etching, Direct write lithography

PROCEEDINGS ARTICLE | September 5, 2014
Proc. SPIE. 9207, Advances in X-Ray/EUV Optics and Components IX
KEYWORDS: Diffraction gratings, Wavefronts, Diffraction, Silicon, Plasma etching, Direct write lithography, Monochromators, Fabrication, Coating, X-ray diffraction

PROCEEDINGS ARTICLE | September 27, 2013
Proc. SPIE. 8848, Advances in X-Ray/EUV Optics and Components VIII
KEYWORDS: Diffraction gratings, Wavefronts, X-rays, Plasma etching, Diffraction, Etching, Fabrication, Holography, Plasma, Silicon

SPIE Journal Paper | September 20, 2013
OE Vol. 52 Issue 09
KEYWORDS: Molybdenum, Silicon, Argon, Interfaces, Chemical species, X-rays, Transmission electron microscopy, Reflectivity, Sputter deposition, Extreme ultraviolet

PROCEEDINGS ARTICLE | September 28, 2011
Proc. SPIE. 8139, Advances in X-Ray/EUV Optics and Components VI
KEYWORDS: Molybdenum, Interfaces, Argon, Reflectivity, Silicon, Extreme ultraviolet, Sputter deposition, Transmission electron microscopy, X-rays, Crystals

Showing 5 of 23 publications
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