Dr. Dmitriy L. Voronov
Staff scientist at Lawrence Berkeley National Lab
SPIE Involvement:
Author
Publications (24)

PROCEEDINGS ARTICLE | June 1, 2018
Proc. SPIE. 10583, Extreme Ultraviolet (EUV) Lithography IX
KEYWORDS: Speckle, Image processing, Atomic force microscopy, Photoresist materials, Fractal analysis, Extreme ultraviolet, Extreme ultraviolet lithography, Line edge roughness, Stochastic processes, EUV optics

PROCEEDINGS ARTICLE | August 23, 2017
Proc. SPIE. 10386, Advances in X-Ray/EUV Optics and Components XII
KEYWORDS: Electron beam lithography, X-ray optics, Nanoimprint lithography, Diffraction gratings

PROCEEDINGS ARTICLE | September 15, 2016
Proc. SPIE. 9963, Advances in X-Ray/EUV Optics and Components XI
KEYWORDS: Diffraction, Etching, X-rays, X-ray diffraction, Wet etching, Plasma etching, Extreme ultraviolet lithography, Monochromators, Direct write lithography, Diffraction gratings

PROCEEDINGS ARTICLE | September 5, 2014
Proc. SPIE. 9207, Advances in X-Ray/EUV Optics and Components IX
KEYWORDS: Fabrication, Diffraction, X-ray diffraction, Silicon, Coating, Wavefronts, Plasma etching, Monochromators, Direct write lithography, Diffraction gratings

PROCEEDINGS ARTICLE | September 27, 2013
Proc. SPIE. 8848, Advances in X-Ray/EUV Optics and Components VIII
KEYWORDS: Fabrication, Diffraction, Holography, Etching, X-rays, Silicon, Wavefronts, Plasma etching, Plasma, Diffraction gratings

SPIE Journal Paper | September 20, 2013
OE Vol. 52 Issue 09
KEYWORDS: Molybdenum, Silicon, Argon, Interfaces, Chemical species, X-rays, Transmission electron microscopy, Reflectivity, Sputter deposition, Extreme ultraviolet

Showing 5 of 24 publications
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