Dr. Dmitriy L. Voronov
Staff scientist at Lawrence Berkeley National Lab
SPIE Involvement:
Author
Publications (25)

Proceedings Article | 9 September 2019
Proc. SPIE. 11108, Advances in X-Ray/EUV Optics and Components XIV
KEYWORDS: Etching, Argon, Sputter deposition, X-ray diffraction, Silicon, Plasma enhanced chemical vapor deposition, Plasma etching, Plasma, Diffraction gratings

Proceedings Article | 1 June 2018
Proc. SPIE. 10583, Extreme Ultraviolet (EUV) Lithography IX
KEYWORDS: Speckle, Image processing, Atomic force microscopy, Photoresist materials, Fractal analysis, Extreme ultraviolet, Extreme ultraviolet lithography, Line edge roughness, Stochastic processes, EUV optics

Proceedings Article | 23 August 2017
Proc. SPIE. 10386, Advances in X-Ray/EUV Optics and Components XII
KEYWORDS: Electron beam lithography, X-ray optics, Nanoimprint lithography, Diffraction gratings

Proceedings Article | 15 September 2016
Proc. SPIE. 9963, Advances in X-Ray/EUV Optics and Components XI
KEYWORDS: Diffraction, Etching, X-rays, X-ray diffraction, Wet etching, Plasma etching, Extreme ultraviolet lithography, Monochromators, Direct write lithography, Diffraction gratings

Proceedings Article | 5 September 2014
Proc. SPIE. 9207, Advances in X-Ray/EUV Optics and Components IX
KEYWORDS: Fabrication, Diffraction, X-ray diffraction, Silicon, Coating, Wavefronts, Plasma etching, Monochromators, Direct write lithography, Diffraction gratings

Showing 5 of 25 publications
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