Dr. Dmitry Batuk
at imec
SPIE Involvement:
Publications (5)

Proceedings Article | 9 April 2024 Presentation + Paper
Proceedings Volume 12958, 1295804 (2024) https://doi.org/10.1117/12.3012322
KEYWORDS: Silicon, Etching, Optical lithography, Nanosheets, Passivation, Semiconducting wafers, Superlattices, Germanium, Oxides, Fin field effect transistors

Proceedings Article | 1 May 2023 Presentation + Paper
Proceedings Volume 12499, 1249909 (2023) https://doi.org/10.1117/12.2659095
KEYWORDS: Etching, Optical lithography, Lithography, Plasma etching, Plasma, Dry etching, Critical dimension metrology, Dielectrics

Proceedings Article | 13 June 2022 Presentation
Proceedings Volume PC12056, PC120560B (2022) https://doi.org/10.1117/12.2614772
KEYWORDS: Optical lithography, Metals, Etching, Transistors, Atomic layer deposition, Silica, Inspection, Electrodes, Transmission electron microscopy, System on a chip

Proceedings Article | 25 May 2022 Presentation + Paper
Proceedings Volume 12056, 120560C (2022) https://doi.org/10.1117/12.2616731
KEYWORDS: Etching, Metals, Plasma etching, Optical lithography, Ruthenium, Plasma, Tin, Dielectrics, Dry etching, Molybdenum

Proceedings Article | 20 March 2020 Presentation + Paper
Mark Biedrzycki, Umesh Adiga, Andrew Barnum, Alain Mousa, Jason Arjavac, Rose Marie Haynes, Anne-Laure Charley, Phillipe Leray, Dmitry Batuk
Proceedings Volume 11325, 113251T (2020) https://doi.org/10.1117/12.2552139
KEYWORDS: Transmission electron microscopy, Metrology, Tomography, Image segmentation, Photoresist materials, Atomic force microscopy, Extreme ultraviolet lithography, Semiconducting wafers, Atomic layer deposition, Image filtering

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