Dr. Dmitry Batuk
at imec
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 20 March 2020 Presentation + Paper
Proc. SPIE. 11325, Metrology, Inspection, and Process Control for Microlithography XXXIV
KEYWORDS: Metrology, Image segmentation, Atomic force microscopy, Transmission electron microscopy, Tomography, Photoresist materials, Image filtering, Atomic layer deposition, Extreme ultraviolet lithography, Semiconducting wafers

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