Dmitry Shur
at KLA Israel
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 10 May 2005 Paper
Dmitry Shur, Alexander Kadyshevitch, Jeremy Zelenko, Carlos Mata, Victor Verdugo, Pierre-Yves Guittet, Brian Starr, Craig Duncan, Stefano Ventola, Jan Klinger
Proceedings Volume 5752, (2005) https://doi.org/10.1117/12.598398
KEYWORDS: Semiconducting wafers, Etching, Critical dimension metrology, Scanning electron microscopy, Photomasks, Process control, Dielectrics, Cadmium sulfide, Silicon, Electrons

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