Dmitry N. Zubov
at Institute of Nanotechnology of Microelectronics
SPIE Involvement:
Author
Publications (3)

Proceedings Article | 15 March 2019
Proc. SPIE. 11022, International Conference on Micro- and Nano-Electronics 2018
KEYWORDS: Thin films, Ferroelectric materials, Etching, Dry etching, Annealing, Dielectrics, Ion beams, Reactive ion etching, Dielectric polarization

Proceedings Article | 18 December 2014
Proc. SPIE. 9440, International Conference on Micro- and Nano-Electronics 2014
KEYWORDS: Semiconductors, Nanotechnology, Inspection, Scanning electron microscopy, Microelectronics, Integrated circuits, Nanoelectronics, Failure analysis, 3D image processing, Fine needle aspiration

Proceedings Article | 18 December 2014
Proc. SPIE. 9440, International Conference on Micro- and Nano-Electronics 2014
KEYWORDS: Gold, Optical microscopes, Metals, Copper, Silver, Image restoration, Scanning electron microscopy, Aluminum, Integrated circuits, Failure analysis

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