Dr. Do-hyeon Kim Profile

Dr. Do-hyeon Kim

at SAMSUNG SDI Co Ltd

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Author

Publications (2)

Proceedings Article | 2 April 2007 Paper

Spin-on Organic Hardmask Materials in 70nm Devices

Chang-Il Oh, Dong-Seon Uh, Do-Hyeon Kim, Jin-Kuk Lee, Hui-Chan Yun, Irina Nam, Min-Soo Kim, Kyong-Ho Yoon, Kyung-Hee Hyung, Nataliya Tokareva, Hwan-Sung Cheon, Jong-Seob Kim, Tu-Won Chang

Proceedings Volume 6519, 65192R (2007) https://doi.org/10.1117/12.711720

KEYWORDS: Etching, Photoresist processing, Polymers, Lithography, Silicon, Semiconducting wafers, Reflectivity, Carbon, Particles, Plasma

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Proceedings Article | 30 March 2007 Paper

Silicon-based anti-reflective spin-on hardmask materials with improved storage stability for 193-nm lithography

Sang Kyun Kim, Sang Hak Lim, Do-hyeon Kim, Sang Ran Koh, Mi-young Kim, Hui Chan Yoon, Dong Seon Uh, Jong Seob Kim, Tuwon Chang

Proceedings Volume 6519, 65190O (2007) https://doi.org/10.1117/12.711866

KEYWORDS: Silicon, Etching, Lithography, Photoresist materials, Photomasks, Polymers, Plasma, Reflectivity, Thin film coatings, Chemical vapor deposition

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