Prof. Dominique Drouin
Director of Operations/Associate Professor at Univ de Sherbrooke
SPIE Involvement:
Publications (13)

Proceedings Article | 4 March 2019
Proc. SPIE. 10905, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXIV
KEYWORDS: Mathematical modeling, Thin films, Interfaces, Silicon, Laser processing, Semiconductor lasers, Laser ablation, Pulsed laser operation, Liquids, Back end of line

Proceedings Article | 27 February 2019
Proc. SPIE. 10913, Physics, Simulation, and Photonic Engineering of Photovoltaic Devices VIII
KEYWORDS: Photovoltaics, Solar cells, Germanium, Interfaces, Silicon, Transmission electron microscopy, Multijunction solar cells, Electrochemical etching, Chemical mechanical planarization

Proceedings Article | 11 May 2010
Proc. SPIE. 7712, Nanophotonics III
KEYWORDS: Nanotechnology, Mirrors, Waveguides, Silicon, Reflectivity, Photonic crystals, Nanophotonics, Waveguide modes, Optical microcavities, Nanowires

Proceedings Article | 21 June 2006
Proc. SPIE. 6281, 22nd European Mask and Lithography Conference
KEYWORDS: Lithography, Electron beam lithography, Electron beams, Glasses, Surface roughness, Chromium, Photomasks, Plasma enhanced chemical vapor deposition, Line edge roughness, Plasma

Proceedings Article | 29 March 2006
Proc. SPIE. 6153, Advances in Resist Technology and Processing XXIII
KEYWORDS: Electron beam lithography, Electron beams, Silicon, Resistance, Chromium, Monte Carlo methods, Silicon films, Transistors, Plasma etching, Line edge roughness

Proceedings Article | 3 March 2006
Proc. SPIE. 6121, Gallium Nitride Materials and Devices
KEYWORDS: Electron beams, Microscopy, Luminescence, Silicon, Diffusion, Image resolution, Gallium nitride, Sapphire, Excitons, Spatial resolution

Showing 5 of 13 publications
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