Mr. Dominique Sanchez
at STMicroelectronics
SPIE Involvement:
Author
Publications (1)

PROCEEDINGS ARTICLE | March 19, 2015
Proc. SPIE. 9424, Metrology, Inspection, and Process Control for Microlithography XXIX
KEYWORDS: Visualization, Imaging systems, Image processing, Inspection, Scanning electron microscopy, Process control, Microelectronics, Semiconductor manufacturing, Semiconducting wafers, Defect inspection

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