Dr. Dominykas Gustas
SPIE Involvement:
Publications (4)

Proceedings Article | 10 April 2024 Presentation + Paper
Proceedings Volume 12953, 1295303 (2024) https://doi.org/10.1117/12.3010890
KEYWORDS: Semiconducting wafers, Critical dimension metrology, Reticles, Scanners, Extreme ultraviolet lithography, Atomic force microscopy, 3D mask effects, Monte Carlo methods, Metrology, Simulations

Proceedings Article | 28 November 2023 Presentation + Paper
Sam Borman, Dominykas Gustas, Hilbert van Loo, Tian Gang, Dorothe Oorschot, Andreas Brouwer, Alberto Colina, Frank Horsten, Tasja van Rhee
Proceedings Volume PC12750, PC127500A (2023) https://doi.org/10.1117/12.2686368
KEYWORDS: Overlay metrology, Simulations, Semiconducting wafers, Scanners, Pupil aberrations, Nanoimprint lithography, Lithography, Light sources and illumination

Proceedings Article | 14 March 2018 Presentation
Frederik Böhle, Andreas Blumenstein, Maïmouna Bocoum, Aline Vernier, Magali Lozano, Jean-Philippe Rousseau, Aurélie Jullien, Dominykas Gustas, Diego Guénot, Jérôme Faure, Máté Kovács, Martin Kretschmar, Peter Simon, Uwe Morgner, Tamás Nagy, Rodrigo López-Martens
Proceedings Volume 10511, 105111A (2018) https://doi.org/10.1117/12.2289088
KEYWORDS: Plasma, Extreme ultraviolet, Mirrors, Pulsed laser operation, Laser systems engineering, Femtosecond phenomena, Ultrafast phenomena, Waveguides, Capillaries, Fiber lasers

Proceedings Article | 9 June 2017 Presentation
Jérôme Faure, Diego Guénot, Dominykas Gustas, Aline Vernier, Benoît Beaurepaire, Frederik Böhle, Rodrigo López-Martens, Agustin Lifschitz
Proceedings Volume 10240, 102400Q (2017) https://doi.org/10.1117/12.2264999
KEYWORDS: Laser systems engineering, Laser energy, Signal to noise ratio, Structural dynamics, Plasma, Femtosecond phenomena, Diffraction, Ultrafast phenomena, Electron beams, Picosecond phenomena

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