Dr. Donald A. Chernoff
President at Advanced Surface Microscopy Inc
SPIE Involvement:
Author
Publications (12)

SPIE Journal Paper | 29 March 2012
JM3 Vol. 11 Issue 1
KEYWORDS: Calibration, Atomic force microscopy, Metrology, Magnetism, Microscopes, Data storage, Standards development, Scanners, Microscopy, Data modeling

SPIE Journal Paper | 1 January 2011
JM3 Vol. 10 Issue 1
KEYWORDS: Calibration, Metrology, Atomic force microscope, Atomic force microscopy, Standards development, Error analysis, Interferometry, Scanners, Interferometers, Helium neon lasers

Proceedings Article | 10 June 2010 Paper
Proc. SPIE. 7729, Scanning Microscopy 2010
KEYWORDS: Metrology, Interferometers, Calibration, Scanners, Error analysis, Atomic force microscopy, Head, Atomic force microscope, Helium neon lasers, Standards development

Proceedings Article | 2 April 2010 Paper
Proc. SPIE. 7638, Metrology, Inspection, and Process Control for Microlithography XXIV
KEYWORDS: Semiconductors, Microscopes, Metrology, Calibration, Microscopy, Error analysis, Magnetism, Atomic force microscopy, Optical discs, Standards development

Proceedings Article | 25 March 2008 Paper
Proc. SPIE. 6922, Metrology, Inspection, and Process Control for Microlithography XXII
KEYWORDS: Microscopes, Diffraction, Beam splitters, Metrology, Calibration, Ultraviolet radiation, Microscopy, Error analysis, Atomic force microscopy, Diffraction gratings

Showing 5 of 12 publications
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