Dr. Donald Pettibone
Principal Engineer at KLA Corp
SPIE Involvement:
Author
Publications (11)

Proceedings Article | 6 December 2004
Proc. SPIE. 5567, 24th Annual BACUS Symposium on Photomask Technology
KEYWORDS: Oxides, Lithography, Deep ultraviolet, Etching, Quartz, Inspection, Atomic force microscopy, Scanning electron microscopy, Photomasks, Semiconducting wafers

Proceedings Article | 6 December 2004
Proc. SPIE. 5567, 24th Annual BACUS Symposium on Photomask Technology
KEYWORDS: Multilayers, Defect detection, Inspection, Reflectivity, Scanning electron microscopy, Printing, Photomasks, Extreme ultraviolet, Extreme ultraviolet lithography, Defect inspection

Proceedings Article | 6 December 2004
Proc. SPIE. 5567, 24th Annual BACUS Symposium on Photomask Technology
KEYWORDS: Lithography, Inspection, Reflectivity, Optical inspection, Image transmission, Photomasks, Extreme ultraviolet, Extreme ultraviolet lithography, Semiconducting wafers, Charged-particle lithography

Proceedings Article | 27 December 2002
Proc. SPIE. 4889, 22nd Annual BACUS Symposium on Photomask Technology
KEYWORDS: Antireflective coatings, Multilayers, Reticles, Etching, Inspection, Reflectivity, Chromium, Photomasks, Extreme ultraviolet, Extreme ultraviolet lithography

Proceedings Article | 27 December 2002
Proc. SPIE. 4889, 22nd Annual BACUS Symposium on Photomask Technology
KEYWORDS: Modulation, Glasses, Inspection, Reflectivity, Optical inspection, Printing, Photomasks, Extreme ultraviolet, Extreme ultraviolet lithography, Autoregressive models

Showing 5 of 11 publications
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