Dr. Donald M. Roy
at Fairchild Semiconductor
SPIE Involvement:
Author
Publications (1)

PROCEEDINGS ARTICLE | May 10, 2005
Proc. SPIE. 5752, Metrology, Inspection, and Process Control for Microlithography XIX
KEYWORDS: Semiconducting wafers, Silicon, Critical dimension metrology, Scanning electron microscopy, Atomic force microscopy, Process control, Time metrology, Reflectivity, Metrology, Etching

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