Dr. Donggyu Yim
Fellow and Vice President at SK Hynix Inc
SPIE Involvement:
Symposium Chair | Conference Chair | Conference Program Committee | Author
Publications (97)

PROCEEDINGS ARTICLE | March 15, 2016
Proc. SPIE. 9780, Optical Microlithography XXIX
KEYWORDS: Lithography, Antireflective coatings, Optical lithography, Data modeling, Visualization, Reflection, Dry etching, Image processing, Scanning electron microscopy, Buildings, Photomasks, Optical proximity correction, Critical dimension metrology, Semiconducting wafers

PROCEEDINGS ARTICLE | October 23, 2015
Proc. SPIE. 9635, Photomask Technology 2015
KEYWORDS: Lithography, Lithographic illumination, Scanners, Error analysis, Inspection, Photomasks, Critical dimension metrology, Geometrical optics, Photoresist processing, Semiconducting wafers

PROCEEDINGS ARTICLE | October 23, 2015
Proc. SPIE. 9635, Photomask Technology 2015
KEYWORDS: Oxides, Deep ultraviolet, Air contamination, Scanners, Chromium, Transmittance, Photomasks, Critical dimension metrology, Semiconducting wafers, Phase shifts

PROCEEDINGS ARTICLE | October 23, 2015
Proc. SPIE. 9635, Photomask Technology 2015
KEYWORDS: Etching, Image processing, Chromium, Scanning electron microscopy, Transmission electron microscopy, Signal processing, Photomasks, Double patterning technology, Critical dimension metrology, Phase shifts

PROCEEDINGS ARTICLE | October 23, 2015
Proc. SPIE. 9635, Photomask Technology 2015
KEYWORDS: Reticles, Metrology, Scanners, Error analysis, Ions, Manufacturing, Image registration, Photomasks, Semiconducting wafers, Overlay metrology

PROCEEDINGS ARTICLE | October 23, 2015
Proc. SPIE. 9635, Photomask Technology 2015
KEYWORDS: Etching, Quartz, Particles, Image restoration, Chromium, Scanning electron microscopy, Photomasks, Deposition processes, Critical dimension metrology, Phase shifts

Showing 5 of 97 publications
Conference Committee Involvement (4)
SPIE Lithography Asia - Korea
13 October 2010 | n/a, Republic of Korea
SPIE Lithography Asia
13 October 2010 | n/a, Republic of Korea
SPIE Lithography Asia - Taiwan
18 November 2009 | Taipei, Taiwan
SPIE Lithography Asia - Taiwan
4 November 2008 | Taipei, Taiwan
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