Mr. Dong-Sik Shim
at Samsung Advanced Institute of Technology
SPIE Involvement:
Author
Publications (3)

PROCEEDINGS ARTICLE | March 13, 2013
Proc. SPIE. 8616, MOEMS and Miniaturized Systems XII
KEYWORDS: Microelectromechanical systems, Switches, Optical lithography, Electrodes, Glasses, LCDs, Aluminum, Plasma etching, Optical switching, Surface micromachining

PROCEEDINGS ARTICLE | October 11, 2012
Proc. SPIE. 8475, Liquid Crystals XVI
KEYWORDS: Microelectromechanical systems, Switches, Iron, Electrodes, Metals, Glasses, LCDs, Laser Doppler velocimetry, Aluminum, Optical switching

PROCEEDINGS ARTICLE | November 19, 2001
Proc. SPIE. 4593, Design, Characterization, and Packaging for MEMS and Microelectronics II
KEYWORDS: Microelectromechanical systems, Thin films, Titanium, Argon, Sputter deposition, Diagnostics, Silicon films, Aluminum, Semiconducting wafers, Temperature metrology

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