Dr. Dong Won Chung
at Rohm and Haas Electronic Materials Korea Ltd
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 1 April 2009
Proc. SPIE. 7273, Advances in Resist Materials and Processing Technology XXVI
KEYWORDS: Lithography, Electronics, Optical lithography, Image compression, Polymers, Diffusion, Electroluminescence, Photoresist materials, Resolution enhancement technologies, Temperature metrology

Proceedings Article | 29 March 2006
Proc. SPIE. 6153, Advances in Resist Technology and Processing XXIII
KEYWORDS: Oxides, FT-IR spectroscopy, Etching, Polymers, Ions, Resistance, Plasma etching, Chemical analysis, Reactive ion etching, Plasma

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