Dong-ho Kong
at SK Hynix Inc
SPIE Involvement:
Author
Publications (1)

PROCEEDINGS ARTICLE | March 31, 2014
Proc. SPIE. 9052, Optical Microlithography XXVII
KEYWORDS: Data modeling, Calibration, Etching, 3D modeling, Scanning electron microscopy, Wafer inspection, Virtual reality, Semiconducting wafers, Process modeling, Chemical mechanical planarization

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