Dr. Dong Chen Profile

Dr. Dong Chen

Principal Scientist at Bruker Nano Inc

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Author

Publications (2)

Proceedings Article | 13 November 2014 Paper

Real-time scanner error correction in white light interferometry

Dong Chen, Joanna Schmit, Matt Novak

Proceedings Volume 9276, 92760I (2014) https://doi.org/10.1117/12.2071276

KEYWORDS: Scanners, Error analysis, Demodulation, Mirrors, 3D metrology, 3D scanning, Optical interferometry, Interferometers, Microscopes, Spherical lenses

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Proceedings Article | 28 May 2014 Paper

Metrology tool for fast measurement of patterned sapphire substrate used in LED manufacturing

Joanna Schmit, Son Bui, Oh-Kyu Kwon, Dong Chen

Proceedings Volume 9110, 91100N (2014) https://doi.org/10.1117/12.2053485

KEYWORDS: 3D metrology, Light emitting diodes, Mirrors, Objectives, Microscopes, Metrology, Sapphire, Manufacturing, Interferometry, Temperature metrology

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Conference Committee Involvement (2)

Optical Metrology and Inspection for Industrial Applications IV

12 October 2016 | Beijing, China

Optical Metrology and Inspection for Industrial Applications III

9 October 2014 | Beijing, China

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