Dr. Dong Chen
Principal Scientist at Bruker Nano Inc
SPIE Involvement:
Conference Program Committee | Author
Publications (2)

PROCEEDINGS ARTICLE | November 13, 2014
Proc. SPIE. 9276, Optical Metrology and Inspection for Industrial Applications III
KEYWORDS: Microscopes, Mirrors, Interferometers, Scanners, Error analysis, Demodulation, 3D metrology, Optical interferometry, 3D scanning, Spherical lenses

PROCEEDINGS ARTICLE | May 28, 2014
Proc. SPIE. 9110, Dimensional Optical Metrology and Inspection for Practical Applications III
KEYWORDS: Microscopes, Mirrors, Metrology, Light emitting diodes, Manufacturing, Interferometry, Sapphire, 3D metrology, Objectives, Temperature metrology

Conference Committee Involvement (2)
Optical Metrology and Inspection for Industrial Applications IV
12 October 2016 | Beijing, China
Optical Metrology and Inspection for Industrial Applications III
9 October 2014 | Beijing, China
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