Dr. Dong Yan Profile

Dr. Dong Yan

Postdoctoral Fellowship at SUNY/Univ at Albany

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Author

Publications (5)

SPIE Journal Paper | 1 October 2005

Low-power MOEMS components for active optical systems

James Castracane, Dong Yan, Seth Madison, Ganesh Panaman, Bai Xu

JM3, Vol. 4, Issue 04, 041702, (October 2005) https://doi.org/10.1117/12.10.1117/1.2121087

KEYWORDS: Microopto electromechanical systems, Prototyping, Electrodes, Semiconducting wafers, Microelectromechanical systems, Diffraction gratings, Electromechanical design, Optical fabrication, Gold, Polymers

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Proceedings Article | 24 January 2004 Paper

Low power MOEMS components for active optical systems

James Castracane, Dong Yan, Seth Madison, Bai Xu

Proceedings Volume 5346, (2004) https://doi.org/10.1117/12.524917

KEYWORDS: Microopto electromechanical systems, Electrodes, Prototyping, Semiconducting wafers, Diffraction gratings, Microelectromechanical systems, Photomasks, Gold, Control systems, Diffraction

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The eventual, widespread insertion of Micro-Opto-Electro-Mechanical Systems (MOEMS) into the marketplace rests fundamentally on the ability to produce viable components that maximize optical performance while minimizing power consumption and size. In addition, the incorporation of optical reconfigurability into custom MOEMS devices offers an extra degree of freedom not possible with conventional components. Active control of surface topology allows for one component to perform multiple functions thus reducing cost and complexity. This paper will focus on the current status of the MOEMS research program at the University at Albany Institute for Materials’ (UAIM) NanoFab 200 with several examples described to illustrate component and system development. In particular, among the MOEMS research portfolio at UAIM, the development of selected MOEMS-based, active optics will be discussed. This active control of diffraction and reflection forms the basis for the utility of such devices. Leveraging the extensive research expertise on the patented MEMS Compound Grating (MCG), emphasis will be placed on the extension of the approach to novel designs, materials and fabrication methods to yield low power, high performance prototypes. The main focus of this paper is on the development of a polymer version (including sacrificial layer, in some designs) of the MCG which allows for ease of fabrication and a reduced electrostatic actuation voltage. Following a system design effort, several generations of the component were fabricated to optimize the process flow. Component metrology, electromechanical characterization and initial results of optical tests will be reported. A second example presented is the design and prototype fabrication of a spring micrograting using a customized SOI process. This highly flexible component builds on the MCG concept and yields an order of magnitude reduction in actuation voltage. These examples will be presented against a backdrop of the broad UAIM program to provide an overview of the applications of MOEMS and their integration with complementary technologies at the wafer level.

Proceedings Article | 21 January 2003 Paper

MOEMS device design, development, and integration for interconnect applications

James Castracane, Bai Xu, Seth Madison, Jaap Verheggen, Dong Yan

Proceedings Volume 4983, (2003) https://doi.org/10.1117/12.477926

KEYWORDS: Prototyping, Microopto electromechanical systems, Reflectivity, Electrodes, Chemical elements, Optical interconnects, Microelectromechanical systems, Optical testing, Integrated optics, Optical fabrication equipment

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Proceedings Article | 17 January 2003 Paper

Novel design and fabrication of a microcentrifuge for biomedical and biochemical applications

Dong Yan, Bai Xu, James Castracane

Proceedings Volume 4982, (2003) https://doi.org/10.1117/12.478163

KEYWORDS: Electrodes, Biomedical optics, Sensors, Finite element methods, Electromechanical design, Modeling and simulation, Microelectromechanical systems, BioMEMS, 3D modeling, Microfluidics

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Proceedings Article | 3 September 2002 Paper

Analysis and testing of an optical add/drop multiplexer based on MEMS micro-actuators

Dong Yan, Seth Madison, Bai Xu, James Castracane

Proceedings Volume 4907, (2002) https://doi.org/10.1117/12.482263

KEYWORDS: Multiplexers, Diffraction, Diffraction gratings, Microelectromechanical systems, Optical communications, Analytical research, Prototyping, Switches, Optical testing, Electrodes

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