Dr. Dongbing Shao
at IBM Corp
SPIE Involvement:
Author
Publications (8)

PROCEEDINGS ARTICLE | April 4, 2017
Proc. SPIE. 10148, Design-Process-Technology Co-optimization for Manufacturability XI
KEYWORDS: Semiconductors, Lithography, Logic, Detection and tracking algorithms, Data modeling, Manufacturing, Computer simulations, 3D modeling, Monte Carlo methods, Tolerancing, Statistical modeling, Performance modeling, Systems modeling, Process engineering, Design for manufacturability

PROCEEDINGS ARTICLE | March 16, 2016
Proc. SPIE. 9781, Design-Process-Technology Co-optimization for Manufacturability X
KEYWORDS: Semiconductors, Diffractive optical elements, Manufacturing, Monte Carlo methods, Microelectronics, Semiconducting wafers, Process modeling, Protactinium, Design for manufacturability

PROCEEDINGS ARTICLE | September 9, 2013
Proc. SPIE. 8880, Photomask Technology 2013
KEYWORDS: Optical lithography, Data modeling, Etching, Silicon, Reflectivity, Computational lithography, Optical proximity correction, Critical dimension metrology, Semiconducting wafers, Near field optics

PROCEEDINGS ARTICLE | March 23, 2011
Proc. SPIE. 7973, Optical Microlithography XXIV
KEYWORDS: Lithography, Photovoltaics, Metrology, Data modeling, Visualization, Silicon, 3D modeling, Critical dimension metrology, Photoresist processing, Semiconducting wafers

PROCEEDINGS ARTICLE | September 25, 2010
Proc. SPIE. 7823, Photomask Technology 2010
KEYWORDS: Data modeling, Calibration, Silicon, Reflectivity, Printing, Photomasks, Optical proximity correction, Critical dimension metrology, Photoresist processing, Semiconducting wafers

PROCEEDINGS ARTICLE | September 25, 2010
Proc. SPIE. 7823, Photomask Technology 2010
KEYWORDS: Data modeling, Calibration, Silicon, 3D modeling, Scanning electron microscopy, Photomasks, Optical proximity correction, Photoresist processing, Semiconducting wafers, Process modeling

Showing 5 of 8 publications
SIGN IN TO:
  • View contact details

UPDATE YOUR PROFILE
Is this your profile? Update it now.
Don’t have a profile and want one?

Back to Top