Dr. Dongbing Shao
at IBM Corp
SPIE Involvement:
Author
Publications (9)

Proceedings Article | 20 March 2019 Paper
Proc. SPIE. 10962, Design-Process-Technology Co-optimization for Manufacturability XIII
KEYWORDS: Optical lithography, Monte Carlo methods, Design for manufacturing, Semiconductor manufacturing, Semiconducting wafers

Proceedings Article | 4 April 2017 Presentation + Paper
Proc. SPIE. 10148, Design-Process-Technology Co-optimization for Manufacturability XI
KEYWORDS: Semiconductors, Lithography, Logic, Detection and tracking algorithms, Data modeling, Manufacturing, Computer simulations, 3D modeling, Monte Carlo methods, Tolerancing, Statistical modeling, Performance modeling, Systems modeling, Process engineering, Design for manufacturability

Proceedings Article | 16 March 2016 Paper
Proc. SPIE. 9781, Design-Process-Technology Co-optimization for Manufacturability X
KEYWORDS: Semiconductors, Diffractive optical elements, Manufacturing, Monte Carlo methods, Microelectronics, Semiconducting wafers, Process modeling, Protactinium, Design for manufacturability

Proceedings Article | 9 September 2013 Paper
Proc. SPIE. 8880, Photomask Technology 2013
KEYWORDS: Optical lithography, Data modeling, Etching, Silicon, Reflectivity, Computational lithography, Optical proximity correction, Critical dimension metrology, Semiconducting wafers, Near field optics

Proceedings Article | 23 March 2011 Paper
Proc. SPIE. 7973, Optical Microlithography XXIV
KEYWORDS: Lithography, Photovoltaics, Metrology, Data modeling, Visualization, Silicon, 3D modeling, Critical dimension metrology, Photoresist processing, Semiconducting wafers

Showing 5 of 9 publications
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