Mr. Dongbo Xu
at Fraunhofer IISB
SPIE Involvement:
Author
Publications (21)

SPIE Journal Paper | August 1, 2017
JM3 Vol. 16 Issue 04

PROCEEDINGS ARTICLE | March 24, 2017
Proc. SPIE. 10143, Extreme Ultraviolet (EUV) Lithography VIII
KEYWORDS: Lithography, Refractive index, Optical properties, Etching, Metals, X-ray diffraction, Nickel, Cobalt, Photomasks, Extreme ultraviolet, Extreme ultraviolet lithography

SPIE Journal Paper | January 19, 2016
JM3 Vol. 15 Issue 01
KEYWORDS: Principal component analysis, Extreme ultraviolet, Photomasks, Databases, Zernike polynomials, Diffraction, Atrial fibrillation, Defect detection, Fourier transforms, Optical filters

PROCEEDINGS ARTICLE | September 23, 2015
Proc. SPIE. 9630, Optical Systems Design 2015: Computational Optics
KEYWORDS: Principal component analysis, Databases, Printing, Zernike polynomials, Neural networks, Photomasks, Extreme ultraviolet, Extreme ultraviolet lithography, Spherical lenses, EUV optics

PROCEEDINGS ARTICLE | March 16, 2015
Proc. SPIE. 9422, Extreme Ultraviolet (EUV) Lithography VI
KEYWORDS: Lithography, Optical properties, Fourier transforms, Printing, Phase retrieval, Neural networks, Photomasks, Extreme ultraviolet, Phase measurement, EUV optics

SPIE Journal Paper | June 11, 2013
OE Vol. 52 Issue 06
KEYWORDS: In situ metrology, Image processing, Principal component analysis, Process modeling, Lithography, Matrices, Optical engineering, Image retrieval, Lithographic illumination, Zernike polynomials

Showing 5 of 21 publications
SIGN IN TO:
  • View contact details

UPDATE YOUR PROFILE
Is this your profile? Update it now.
Don’t have a profile and want one?

Back to Top